機床商務網(wǎng)
詳細介紹
設備川崎提供了業(yè)界的全系列半導體和電子搬運機器人。這些機器人是專為在無塵室中應用而製造的，包括ISO 1級。速度、準確度以及伸展範圍使這些機器人適合搬運精密的半導體晶圓、LCD面板、有機EL，以及太陽能電池板。
| Photo | Model | Arm | Degree of freedom (axes) | Motion Range | Maximum reach(mm) | Repeatability (mm) | Cleanliness | Hand specification | Controller | Software | Manual | ||||
| θ1 axis (rotation?JT2 (°) | Z axis (up-down?JT3) (㎜) | θ2 axis (rotation?JT4) (°) | H1 axis (rotation?JT6) (°) | H2 axis (rotation?JT7) (°) | |||||||||||
 | NTS10 | Single | 4 | 340 | 470 | 340 | 340 | - | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 | Standard software for oparation KMTerm KSUtility Lite | Operation manual Communication commａnd manual Introduction procedure for integrated package software (K-Fast) |
| NTS20 | Double | 5 | 340 | 470 | 340 | 340 | 340 | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 | Standard software for oparation KMTerm KSUtility Lite | Operation manual Communication commａnd manual Introduction procedure for integrated package software (K-Fast) |
 | TTS10 | single | 4 | 340 | 470 | 340 | 340 | - | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 | Standard software for oparation KMTerm KSUtility Lite | Operation manual Communication commａnd manual Introduction procedure for integrated package software (K-Fast) |
| TTS20 | Double | 5 | 340 | 470 | 340 | 340 | 340 | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 | Standard software for oparation KMTerm KSUtility Lite | Operation manual Communication commａnd manual Introduction procedure for integrated package software (K-Fast) |
機床商務網(wǎng)