主要特點：

陶瓷修整環(huán)由高純氧化鋁粉燒結(jié)而成，具有硬度高，精度高，形狀保持性好，無需修整、壽命長等特點，特別適用于晶圓或芯片等精度要求高的產(chǎn)品的研磨拋光制程，能夠?qū)崿F(xiàn)對研磨盤的在線高精修整和對研磨液的均勻分散。

Main features

The ceramic grinding ring is made of high-purity alumina powder, It has high hardness, high precision,good shape retention, no need for dressing and long life. It is especially suitable for the grinding and polishing process of products with high precision such as wafer or chip. It can realize on-line high-precision dressing of the grinding disc and uniform dispersion of the grinding liquid.

應(yīng)用領(lǐng)域：

主要應(yīng)用于LED 襯底片、外延片的背面研磨、拋光制程，配套設(shè)備主要有創(chuàng)技、NTS、凱勒斯、捷斯奧等廠家的研磨機、拋光機。

Application

It is mainly used in the back grinding and polishing process of LED substrate sheets and epitaxial wafers. The supporting equipments mainly include grinding machines and polishing machines from manufacturers such as Speedfam,NTS, Galaxies and WEC.

規(guī)格型號：

我公司可按標(biāo)準(zhǔn)Q/ZMS 029—2008 提供陶瓷修整環(huán)，外徑范圍：φ182-576 mm，并可根據(jù)用戶要求設(shè)計和制造各種非標(biāo)產(chǎn)品。

Specification:

Our company can provide ceramic trim ring according to standard Q/ZMS 029-2008, the outer diameter range: φ182-576 mm, and can design and manufacture various non-standard products according to user requirements.

陶瓷修整環(huán)規(guī)格及精度

Model specification and the precision for ceramic ring