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什么是滾針電動缸? What is Million Actuator
滾針電動缸是一種直線運動電動缸，采用艾塞路的滾針式導(dǎo)柱“精密滾針導(dǎo)柱"。
精密滾針導(dǎo)柱采用滾針作為滾動體，實現(xiàn)了高精度的直線性。因此，滾針電動缸是一種具有3個“1μm"的高精度、高剛性直線運動電動缸。
Million Actuator is a linear actuator that ISEL original roller type guide “Million Guide" is equipped inside. The “Million Guide" adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of“1 micron"with high precision and high rigidity.
采用高剛性、高精度滾針式直線運動導(dǎo)柱“精密滾針導(dǎo)柱"
High Rigidity & High Precision Roller type linear motion guide “Million Guide"equipped inside.
從點到線 Point to Line
采用滾珠時(滾珠型)
Ball case (Ball type)
點接觸
Point contact 
接觸面積小
Small contact area 采用滾針時(精密滾針導(dǎo)柱)
Roller case (Million Guide)
線接觸
Line contact 
接觸面積大
Small contact area 3個“1μm" Three kinds of“1μm!"
剛性1μm
1μm“Rigidity" 
進給精度1μm
1μm“Feed Accuracy" 
直進性1μm
1μm“Linear Travelling" 用途 Applications
反射鏡和透鏡微調(diào)
Minute adjustment of the Mirror and Lens 
對準(zhǔn)臺X?Y?θ軸調(diào)整
X/Y/θ axis adjustment of the Alignment stage 
相機對焦
Camera Focus 
試驗裝置
Test equipment 
感應(yīng)器調(diào)整
Sensor adjustment 
Z 軸平臺定位
Z axis stage positioning 
- 步進曝光機等各種光學(xué)設(shè)備的透鏡和反射鏡 移動、微小角度調(diào)整
- 對準(zhǔn)臺 X?Y?θ軸調(diào)整
- 相機、感應(yīng)器位置調(diào)整
- Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
- X/Y/θaxis adjustment of the alignment stage
- Positioning adjustment of the camera and sensor
- 顯微鏡、望遠(yuǎn)鏡的透鏡和反射鏡調(diào)整
- 工作臺定位
- 半導(dǎo)體、液晶制造裝置
- 各種自動設(shè)備、試驗裝置等
- Lens and mirror adjustment of the microscope/ telescope
- Table positioning
- Manufacturing equipment of the semiconductor and liquid crystal
- Automatic machine and test equipment etc.
滾針電動缸實現(xiàn)剛性1μm※1
Million Actuator has 1μm Rigidity
采用高精度的寬幅滾針，剛性比原來的滾珠類型提高了10倍以上。
High precision wide roller realizes over 10 times rigidity compared to the conventional ball type.
接觸面積比較
Comparison of Contact Area
精密滾針導(dǎo)柱接觸面積大， 實現(xiàn)了高剛性。
Million Guide realizes high rigidity for its large contact area. 采用滾珠時(滾珠型)
Ball case (Ball type)
點接觸
Point contact 接觸面積小
Small contact area 采用滾針時(精密滾針導(dǎo)柱)
Roller case (Million Guide)
線接觸
Line contact 接觸面積大
Small contact area 側(cè)壓剛性彎曲比較
Comparison of Lateral Pressure Deflection (Rigidity)
精密滾針導(dǎo)柱采用事例 Application examples of Million Guide
精密滾針導(dǎo)柱，由于其高剛性在以下這些地方也被廣泛使用。
Million Guide is used for the following applications by its high rigidity. 
馬達(dá)鐵芯的沖切模具 Punching Die of Motor core
TAB膠帶沖切模具 Punching Die of TAB tape
※1根據(jù)使用條件數(shù)值可能會有所不同。 ※1 Values may vary by the applications/conditions.
滾針電動缸的送給精度1μm※1
Million Actuator has 1μm Feed Accuracy
使用高精度的寬幅型的滾針、保持剛性的同時成功實現(xiàn)了低負(fù)荷。 因此滾動阻力被抑制到極限，達(dá)到了1μm進給精度。
利用這個高進給精度、在曝光機的鏡頭 · 鏡片 · 平臺的高精度定位等方面精密滾針導(dǎo)柱被廣泛使用。
ISEL has succeeded in low preload with keeping rigidity by using high precision wide rollers. Million Guide has achieved 1 micron feed accuracy by minimizing the rolling resistance to the limit. For its high feed accuracy, Million Guide is adopted for high precision positioning of the mirror, lens and table of the exposure machine.
滾針式的優(yōu)點
Advantages of Roller type
滾珠循環(huán)式的場合
Circular ball type
滾珠之間相互接觸、碰撞而產(chǎn)生的摩擦，造成磨損、臟污、 發(fā)熱等。另外，循環(huán)時負(fù)荷的加壓、減壓反復(fù)發(fā)生。非常容 易造成振動。
Ball contact/ collision makes friction, leading to wear, dust and heat emission. The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.
精密滾針導(dǎo)柱(滾針)的場合
Million Guide (Roller type)
滾針之間相互不接觸,不會發(fā)生轉(zhuǎn)動體的接觸、碰撞、摩擦。 另外，因為是非循環(huán)、低負(fù)荷，不會造成加壓時沖擊、振動也 減少。能夠?qū)崿F(xiàn)順暢、微小的送給。
Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.
超低振動支撐著高進給精度
Ultra low vibration supporting high dynamic accuracy
和滾珠類型相比，滾針導(dǎo)柱到達(dá)1/20 以下的低振動! 對于微小進給量最合適!
Dynamic accuracy ensured by low vibration under 1/20 compared to that of ball type.
響應(yīng)速度支撐著1μm的進給精度
Tracking ability supporting 1μm feed accuracy
將滾動阻力控制到極限、把0.1μm為1單位的微小進給量變成可能，實現(xiàn)了的響應(yīng)速度。
Million Guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.
脈沖信號 (pls) Commａnd pulse (pls)
※GMA2815M中無負(fù)荷時數(shù)據(jù)。※The data at no load on GMA2815M. ※1μm的進給精度表示可以以1μm為單位進行微小進給。進給方向的重復(fù)定位精度在 ±1.0μm以下。本數(shù)值不包含滾珠絲杠的導(dǎo)程誤差，因此在所有行程之間會加上滾珠絲杠導(dǎo)程誤差。 數(shù)值可能會因使用條件而異。
※1“1 micron feed accuracy"means that minute feeding of 1 micron unit is possible with our Million actuator. Repetitive positioning accuracy is less than ±1.0 micron in the feed direction. This value does not include the lead error of ball screw; considering the range of whole stroke, the lead error of ball screw needs to be added to this. Values may vary by the applications/ conditions.
滾針電動缸的直進性1μm※1
Million Actuator has 1μm Linear Travelling
實現(xiàn)了高剛性、低振動的滾針導(dǎo)柱具有良好直線性、特別是往復(fù)運動精度比原來提高3倍 以上。利用這個特性、應(yīng)用于微細(xì)的PCB基板開孔、半導(dǎo)體的組裝等,在精密半導(dǎo)體領(lǐng)域 被廣泛使用。
Million Guide realizes excellent linear travelling, with features of high rigidity and low vibration. Million Guide repeatability, in particular, is over 3 times as accurate as that of conventional one. For its advantage, Million Guide is widely adopted in the field of precision semiconductor, like minute drilling on PCB and semiconductor mounting etc.
X·Y軸全方向 往復(fù)運動精度比較
Comparison of Repeatability:X/Y directions
振動大、剛性低的滾珠導(dǎo)柱的話，位置精度偏差大不穩(wěn)定。滾針氣缸的話，振動小并且到達(dá)很好的往復(fù)運動精度!
Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million Actuator realizes excellent repeatability for its low vibration feature.
X·Y·Z軸全方向 重復(fù)定位精度比較
Repetitive Positioning Accuracy:X/Y/Z directions
高精度滾針導(dǎo)柱和滾珠絲杠的配套組合，滾針氣缸的重復(fù)定位精度實現(xiàn)了X·Y·Z全方向±1.0μm!
Combination of high precision Million Guide and ball screw makes the repetitive positioning accuracy of Million Actuator within ± 1.0μm in X/Y/Z directions.
采用滾針電動缸的優(yōu)點
Merits of Adopting Million Actuator
1.
超高精度化
Ultra High Precision
成功實現(xiàn)了以前不可能達(dá)到的1μm單位高精度定位，提高了產(chǎn)品精度!
Improves product accuracy by high precision positioning of 1μm unit, which has been impossible before. 
2.
節(jié)省空間
Space Saving
簡易構(gòu)造，節(jié)省空間!
Compact structure does not take much room. 
3.
減少工時
Workload Reduction
一體化構(gòu)造，縮短客戶設(shè)計時間!
Integral construction reduces the customer’s device design time. 安裝簡單，縮短組裝時間!
Easy installation shortens assembly time. 
本體外側(cè)上裝備有自動開關(guān)。 → 調(diào)整開關(guān)位置很容易，節(jié)省空間。
Auto switch is equipped standard on the outside body. → Easy switch position adjustment, and space saving.
有帶電機和不帶電機兩種類型。客戶可電機。 → 結(jié)合客戶的控制樣式、要求等，也可代為選定電機。
Motorless specification is also in standard line-up, as well as the specification with motor. The specified motor type can be equipped that the customer wants. → You can select the motor according to your control specifications and demand/request.
滾針電動缸標(biāo)準(zhǔn)的訂單型號 Order type of Standard Million Actuator
外形尺寸圖 Dimensional Outline Drawing
GMA2010
※虛線處是標(biāo)準(zhǔn)電機 ※Broken line part means standard motor.
GMA2815
※虛線處是標(biāo)準(zhǔn)電機 ※Broken line part means standard motor.
GMA4220
※虛線處是標(biāo)準(zhǔn)電機 ※Broken line part means standard motor.
GMA6025
※虛線處是標(biāo)準(zhǔn)電機 ※Broken line part means standard motor.
- 上述規(guī)格如有變更，恕不另行通知。
- The above specifications are subject to change without advanced notice.
電機圖紙?zhí)峁┦纠缦?/b> Examples of motor drawings to be provided are as follows
GMA2010 電機類型
GMA2010 Motor Type
GMA2010 Motor Type
| D |
| 15 |
| 16 |
GMA2815 電機類型
GMA2815 Motor Type
GMA2815 Motor Type
| L |
| 20 |
| 15 |
GMA4220 電機類型
GMA4220 Motor Type
GMA4220 Motor Type
| D |
| φ5 |
| φ6 |
GMA6025 電機類型
GMA6025 Motor Type
GMA6025 Motor Type
| d | D | P |
| φ6.35 | φ38.1 | 47.14 |
| φ10 | φ36 | 50 |
正式產(chǎn)品/標(biāo)準(zhǔn)式樣 滾針電動缸(GMA系列)式樣(搭載電機使用時的參考值) Line-up / Standard Specifications Million Actuator (GMA Series) Specifications (Reference values when using the equipped motors)
| 名稱Product name | 滾針電動缸 Million Actuator | ||||
|---|---|---|---|---|---|
| 型號 Type | GMA2010 | GMA2815 | GMA4220 | GMA6025 | |
| 安裝角落 Installation width | 20×20mm | 28×28mm | 42×42mm | 60×60mm | |
| 有效行程※3 Effective stroke | 10mm | 15mm | 20mm | 25mm | |
軸方向推力※1 Axial thrust | 額定 Rating | 30N | 50N | 150N | 300N |
瞬間 Instantaneous maximum | 60N | 100N | 250N | 500N | |
送給速度※1 Feed speed | 額定 Rating | 10mm/sec(電機 600min-1 時) 10mm/sec(In case of Motor 600min-1) | 15mm/sec (電機 450min-1 時) 15mm/sec(In case of Motor 450min-1) | 20mm/sec (電機 400min-1 時) 20mm/sec(In case of Motor 400min-1) | |
瞬間 Instantaneous maximum | 50mm/sec(電機 3000min-1 時) 50mm/sec(In case of Motor 3000min-1) | 100mm/sec(電機 3000min-1 時) 100mm/sec(In case of Motor 3000min-1) | 100mm/sec(電機 2000min-1 時) 100mm/sec(In case of Motor 2000min-1) | ||
| 送給絲杠 Feed screw | 精密研磨滾珠絲杠 Precision ground ball screw | ||||
| 絲杠導(dǎo)線 Screw lead | 1mm | 2mm | 3mm | ||
重復(fù)定位精度 Repetitive positioning accuracy | ±1.0μm | ||||
| 空轉(zhuǎn) Lost motion | 3.0μm | ||||
| 分辨率 Resolution | 0.1μm/pls※2 | 0.1μm/pls※2 | 0.2μm/pls※2 | 0.3μm/pls※2 | |
搭載標(biāo)準(zhǔn)電機(參考) Standard motor(Reference) | (株)三明步進電機 Si servo(附帶編碼器) Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd. | ||||
| TS3692N61S02 | TS3641N61S02 | TS3617N370S04 | TS3653N324S04 | ||
| 電源電壓 Power supply voltage | DC24V±10% | ||||
| 感應(yīng)器 Sensor | 無 | 磁性接近感應(yīng)器 附帶2個(ASA電子工業(yè)(株)制 ACH02RW) Magnetic proximity switches 2 pcs (ACH02RW made by ASA Electronics Industry) | |||
| 重量 | 約0.25kg Approx.0.25kg | 約0.4kg Approx.0.4kg | 約1.3kg Approx.1.3kg | 約3.7kg Approx.3.7kg | |
| 使用溫度范圍 Operating temperature range | 0~50°C | ||||
- ※ 搭載電機使用時的注意事項參考:
- ※1 請不要長時在推力或速度下使用。可能會造成滾珠絲杠的壽命顯著下降，推力或速度請在瞬時使用。
- ※2 電機編碼器的分辨率設(shè)定為10000pls/rev時的值。
- ※3 請在裝置側(cè)安裝擋塊等，確保其動作時不會超過有效行程。
- ※ 上面數(shù)據(jù)是帶有標(biāo)準(zhǔn)電機時的數(shù)據(jù)。
- ※ 重量中包含標(biāo)準(zhǔn)電機的重量(不含電纜重量)。
- ※ 上面重復(fù)定位精度數(shù)據(jù)要求絲杠的溫度是固定的。(不考慮周圍?絲杠溫度變化帶來的影響 )
- ※Precautions when using the equipped motors:
- ※1 Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened; The maximum thrust/ speed operation should be limited to instantaneous use.
- ※2 Values at resolution set of motor encoder“10000pls/rev"
- ※3 Install a stopper etc. on the device side so that it does not run beyond its effective stroke.
- ※ It is the data with the standard motor equipped.
- ※ The weight includes the standard motor. (Cable weight is excluded.)
- ※ The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)
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