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詳細介紹
ATLEX-1000-I準分子雷射 特點
- 預(yù)先電離產(chǎn)生脈衝
- 高壓固態(tài)脈衝產(chǎn)生器
- 雷射頭體積 <>
- TMC（全金屬陶瓷）雷射管
- 集成真空泵和鹵素過濾器
- 風冷/可選液冷，主動熱管理系統(tǒng)
- 用於系統(tǒng)集成的 RS-485、RS232、USB 和光纖接口
- 可清洗的光學支架
- 能量穩(wěn)定
- 符合歐洲 CE 標準
- RoHS 合規(guī)
ATLEX-1000-I準分子雷射 應(yīng)用：
- 微加工
- 雷射燒蝕
- 醫(yī)學（屈光雷射近視手術(shù)）
- 光譜學
- 計量學
ATLEX-1000-I Specifications | |||
Gas Medium | ArF | KrF | Units |
Wavelength | 193 | 248 | nm |
High Voltage Switching Technique | Solid State Switch | ||
Max. Pulse Energy 1 | 10 | 15 | mJ |
Max. Average Power | 8 | 10 | W |
Max. Rep Rate | 1000 | Hz | |
Pulse Duration 2 | 5 – 8 | ns | |
Beam Dimensions 2 (V x H) | 4 x 6 | mm | |
Beam Divergence 2 (V x H) | 1 x 2 | mrad | |
Energy Stability (standard deviation) | <> | % | |
Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm | |
Weight | 60 | kg | |
Cooling | Cooling Air / Optional Liquid | ||
Power requirement | 230 VAC / 10 A / 1 phase / 50-60 Hz | ||
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
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