ATLEX-300-I/ATLEX-500-I準分子雷射 特點：
- Soft corona preionization
- HV-solid state pulser
- Laser head volume <>
- TMC (Total-Metal-Ceramic) Vessel
- Integrated vacuum pump & halogen filter
- Air Cooled / Optional Liquid Cooled, active thermal management
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Meets European CE-standard
- RoHS compliance
- Micromachining
- Laser ablation
- Medicine (refractive surgery)
- Spectroscopy
- Metrology
| ATLEX-300-I Specifications | ||||||
| Gas Medium | F2 | ArF | KrF | XeCl | XeF | Units |
| Wavelength | 157 | 193 | 248 | 308 | 351 | nm |
| High Voltage Switching Technique | Solid State Switch | |||||
| Max. Pulse Energy 1 | 1 | 10 | 15 | 8 | 7 | mJ |
| Max. Average Power | 0.2 / 0.5 | 2.4 / 4.0 | 4.0 / 6.5 | 2.0 / 3.0 | 1.7 / 2.5 | W |
| Max. Rep Rate | 300 / 500 | Hz | ||||
| Pulse Duration 2 | 5 – 8 | ns | ||||
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | ||||
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | ||||
| Energy Stability (standard deviation) | < 3=""> | % | ||||
| Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm | ||||
| Weight | 60 | kg | ||||
| Cooling | Cooling Air / Optional Liquid | |||||
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | |||||
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
