滾針電動(dòng)缸是一種直線運(yùn)動(dòng)電動(dòng)缸，采用艾塞路的滾針式導(dǎo)柱“精密滾針導(dǎo)柱”。
精密滾針導(dǎo)柱采用滾針作為滾動(dòng)體，實(shí)現(xiàn)了高精度的直線性。因此，滾針電動(dòng)缸是一種具有3個(gè)“1μm”的高精度、高剛性直線運(yùn)動(dòng)電動(dòng)缸。
Million Actuator is a linear actuator that ISEL original roller type guide “Million Guide” is equipped inside. The “Million Guide” adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of“1 micron”with high precision and high rigidity.
- 步進(jìn)曝光機(jī)等各種光學(xué)設(shè)備的透鏡和反射鏡 移動(dòng)、微小角度調(diào)整
- 對(duì)準(zhǔn)臺(tái) X?Y?θ軸調(diào)整
- 相機(jī)、感應(yīng)器位置調(diào)整
- Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
- X/Y/θaxis adjustment of the alignment stage
- Positioning adjustment of the camera and sensor
- 顯微鏡、望遠(yuǎn)鏡的透鏡和反射鏡調(diào)整
- 工作臺(tái)定位
- 半導(dǎo)體、液晶制造裝置
- 各種自動(dòng)設(shè)備、試驗(yàn)裝置等
- Lens and mirror adjustment of the microscope/ telescope
- Table positioning
- Manufacturing equipment of the semiconductor and liquid crystal
- Automatic machine and test equipment etc.
采用高精度的寬幅滾針，剛性比原來(lái)的滾珠類(lèi)型提高了10倍以上。
High precision wide roller realizes over 10 times rigidity compared to the conventional ball type.
※1根據(jù)使用條件數(shù)值可能會(huì)有所不同。 ※1 Values may vary by the applications/conditions.
使用高精度的寬幅型的滾針、保持剛性的同時(shí)成功實(shí)現(xiàn)了低負(fù)荷。 因此滾動(dòng)阻力被抑制到極限，達(dá)到了1μm進(jìn)給精度。
利用這個(gè)高進(jìn)給精度、在曝光機(jī)的鏡頭 · 鏡片 · 平臺(tái)的高精度定位等方面精密滾針導(dǎo)柱被廣泛使用。
ISEL has succeeded in low preload with keeping rigidity by using high precision wide rollers. Million Guide has achieved 1 micron feed accuracy by minimizing the rolling resistance to the limit. For its high feed accuracy, Million Guide is adopted for high precision positioning of the mirror, lens and table of the exposure machine.
滾珠之間相互接觸、碰撞而產(chǎn)生的摩擦，造成磨損、臟污、 發(fā)熱等。另外，循環(huán)時(shí)負(fù)荷的加壓、減壓反復(fù)發(fā)生。非常容 易造成振動(dòng)。
Ball contact/ collision makes friction, leading to wear, dust and heat emission. The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.
滾針之間相互不接觸,不會(huì)發(fā)生轉(zhuǎn)動(dòng)體的接觸、碰撞、摩擦。 另外，因?yàn)槭欠茄h(huán)、低負(fù)荷，不會(huì)造成加壓時(shí)沖擊、振動(dòng)也 減少。能夠?qū)崿F(xiàn)順暢、微小的送給。
Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.
和滾珠類(lèi)型相比，滾針導(dǎo)柱到達(dá)1/20 以下的低振動(dòng)! 對(duì)于微小進(jìn)給量最合適!
Dynamic accuracy ensured by low vibration under 1/20 compared to that of ball type.
將滾動(dòng)阻力控制到極限、把0.1μm為1單位的微小進(jìn)給量變成可能，實(shí)現(xiàn)了的響應(yīng)速度。
Million Guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.
實(shí)現(xiàn)了高剛性、低振動(dòng)的滾針導(dǎo)柱具有良好直線性、特別是往復(fù)運(yùn)動(dòng)精度比原來(lái)提高3倍 以上。利用這個(gè)特性、應(yīng)用于微細(xì)的PCB基板開(kāi)孔、半導(dǎo)體的組裝等,在精密半導(dǎo)體領(lǐng)域 被廣泛使用。
Million Guide realizes excellent linear travelling, with features of high rigidity and low vibration. Million Guide repeatability, in particular, is over 3 times as accurate as that of conventional one. For its advantage, Million Guide is widely adopted in the field of precision semiconductor, like minute drilling on PCB and semiconductor mounting etc.
振動(dòng)大、剛性低的滾珠導(dǎo)柱的話(huà)，位置精度偏差大不穩(wěn)定。滾針氣缸的話(huà)，振動(dòng)小并且到達(dá)很好的往復(fù)運(yùn)動(dòng)精度!
Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million Actuator realizes excellent repeatability for its low vibration feature.
高精度滾針導(dǎo)柱和滾珠絲杠的配套組合，滾針氣缸的重復(fù)定位精度實(shí)現(xiàn)了X·Y·Z全方向±1.0μm!
Combination of high precision Million Guide and ball screw makes the repetitive positioning accuracy of Million Actuator within ± 1.0μm in X/Y/Z directions.
- 上述規(guī)格如有變更，恕不另行通知。
- The above specifications are subject to change without advanced notice.
GMA2010 Motor Type
| D |
| 15 |
| 16 |
GMA2815 Motor Type
| L |
| 20 |
| 15 |
GMA4220 Motor Type
| D |
| φ5 |
| φ6 |
GMA6025 Motor Type
| d | D | P |
| φ6.35 | φ38.1 | 47.14 |
| φ10 | φ36 | 50 |
| 名稱(chēng)Product name | 滾針電動(dòng)缸 Million Actuator | ||||
|---|---|---|---|---|---|
| 型號(hào) Type | GMA2010 | GMA2815 | GMA4220 | GMA6025 | |
| 安裝角落 Installation width | 20×20mm | 28×28mm | 42×42mm | 60×60mm | |
| 有效行程※3 Effective stroke | 10mm | 15mm | 20mm | 25mm | |
軸方向推力※1 Axial thrust | 額定 Rating | 30N | 50N | 150N | 300N |
瞬間 Instantaneous maximum | 60N | 100N | 250N | 500N | |
送給速度※1 Feed speed | 額定 Rating | 10mm/sec(電機(jī) 600min-1 時(shí)) 10mm/sec(In case of Motor 600min-1) | 15mm/sec (電機(jī) 450min-1 時(shí)) 15mm/sec(In case of Motor 450min-1) | 20mm/sec (電機(jī) 400min-1 時(shí)) 20mm/sec(In case of Motor 400min-1) | |
瞬間 Instantaneous maximum | 50mm/sec(電機(jī) 3000min-1 時(shí)) 50mm/sec(In case of Motor 3000min-1) | 100mm/sec(電機(jī) 3000min-1 時(shí)) 100mm/sec(In case of Motor 3000min-1) | 100mm/sec(電機(jī) 2000min-1 時(shí)) 100mm/sec(In case of Motor 2000min-1) | ||
| 送給絲杠 Feed screw | 精密研磨滾珠絲杠 Precision ground ball screw | ||||
| 絲杠導(dǎo)線 Screw lead | 1mm | 2mm | 3mm | ||
重復(fù)定位精度 Repetitive positioning accuracy | ±1.0μm | ||||
| 空轉(zhuǎn) Lost motion | 3.0μm | ||||
| 分辨率 Resolution | 0.1μm/pls※2 | 0.1μm/pls※2 | 0.2μm/pls※2 | 0.3μm/pls※2 | |
搭載標(biāo)準(zhǔn)電機(jī)(參考) Standard motor(Reference) | (株)三明步進(jìn)電機(jī) Si servo(附帶編碼器) Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd. | ||||
| TS3692N61S02 | TS3641N61S02 | TS3617N370S04 | TS3653N324S04 | ||
| 電源電壓 Power supply voltage | DC24V±10% | ||||
| 感應(yīng)器 Sensor | 無(wú) | 磁性接近感應(yīng)器 附帶2個(gè)(ASA電子工業(yè)(株)制 ACH02RW) Magnetic proximity switches 2 pcs (ACH02RW made by ASA Electronics Industry) | |||
| 重量 | 約0.25kg Approx.0.25kg | 約0.4kg Approx.0.4kg | 約1.3kg Approx.1.3kg | 約3.7kg Approx.3.7kg | |
| 使用溫度范圍 Operating temperature range | 0~50°C | ||||
- ※ 搭載電機(jī)使用時(shí)的注意事項(xiàng)參考:
- ※1 請(qǐng)不要長(zhǎng)時(shí)在推力或速度下使用。可能會(huì)造成滾珠絲杠的壽命顯著下降，推力或速度請(qǐng)?jiān)谒矔r(shí)使用。
- ※2 電機(jī)編碼器的分辨率設(shè)定為10000pls/rev時(shí)的值。
- ※3 請(qǐng)?jiān)谘b置側(cè)安裝擋塊等，確保其動(dòng)作時(shí)不會(huì)超過(guò)有效行程。
- ※ 上面數(shù)據(jù)是帶有標(biāo)準(zhǔn)電機(jī)時(shí)的數(shù)據(jù)。
- ※ 重量中包含標(biāo)準(zhǔn)電機(jī)的重量(不含電纜重量)。
- ※ 上面重復(fù)定位精度數(shù)據(jù)要求絲杠的溫度是固定的。(不考慮周?chē)?絲杠溫度變化帶來(lái)的影響 )
- ※Precautions when using the equipped motors:
- ※1 Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened; The maximum thrust/ speed operation should be limited to instantaneous use.
- ※2 Values at resolution set of motor encoder“10000pls/rev”
- ※3 Install a stopper etc. on the device side so that it does not run beyond its effective stroke.
- ※ It is the data with the standard motor equipped.
- ※ The weight includes the standard motor. (Cable weight is excluded.)
- ※ The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)
