Q開(kāi)關(guān)調(diào)制CO2激光器
特點(diǎn)：內(nèi)置聲光調(diào)Q和光柵的二氧化碳激光器，可選定譜線輸出超短脈沖。
應(yīng)用：EUV的種子光源等。
Q開(kāi)關(guān)調(diào)制CO2激光器
產(chǎn)品參數(shù)：
| 產(chǎn)品型號(hào) | L50Q | L50GQ |
| 峰值功率 | 1Kwatt | 250watt |
| 脈沖能量 | 400uj | 0.1mj |
| 脈沖寬度 | <380ns | <380ns |
| 重復(fù)頻率 | 50KHz | 50KHz |
| M2 | <1.3 | <1.3 |
| 光腰直徑 | 2.4mm | 2.4mm |
| 光腰位置 | 輸出鏡 | 輸出鏡 |
| 功率穩(wěn)定性 | ±5% | ±5% |
| 全角發(fā)散角 | 5.5mrad | 5.5mrad |
| 波長(zhǎng)(μm) | 10.5~10.7 | 9.2~10.8 |
| 電 壓 | 28VDC | 28VDC |
| 電 流 | 28Amp | 28Amp |
| 冷卻方式 | 強(qiáng)制水冷1GPM | 強(qiáng)制水冷1GPM |
| 光管尺寸(mm)長(zhǎng)×寬×高 | 750.3×120×140 | 750.3×120×140 |
(µm) 10.3 - 10.7 10.3 - 10.7 CW Minimum Power (W)¹ 0.4 0.4 Power Stability² ±20% ±2% Mode Quality (M²)³ <1.1 <1.1 Beam Waist Diameter 2.4 mm 2.4 mm Waist Location Output Coupler Output Coupler Full Div. Angle 5.5 mrad 5.5 mrad Polarization4 Random Random Rise Time (µs) 250 250 Fall Time (µs) 250 250 Supply Voltage 12VDC 20W Regulated 12VDC 20W Regulated Electronic PWM Parameters Frequency up to 100 kHz, duty cycle 0-* Frequency up to 100 kHz, duty cycle 0-* Heat Dissipation < 20W < 20W Minimum Cooling Requirement Air Cooled Fan Cooled Closed Loop Working Temperature 5-40° C 5-40° C Laser Weight5 2.1 lbs. 4 lbs. RF Driver Weight 1 lbs. 1 lbs. Approx. Dimensions (L x W x H inch) 7.5 x 2 x 2.5 7.5 x 4 x 2.5
