福克斯波羅 P0926GV FBM231
福克斯波羅 P0926GV FBM231
編程說明
= 1 \* GB3 ① 本系統為液位的雙位控制系統。液位可分四段設定和顯示，在zui低液位時自動啟泵，當液位到達設定值時自動停泵。
= 2 \* GB3 ② 采用IL/ILC分支指令，通過0008旋鈕實現手動/自動兩種功能的選擇，當0008旋鈕閉合時，自動指示燈亮，系統執(zhí)行IL/ILC分支內程序，完成自動監(jiān)控；當0008旋鈕打開時，手動指示燈亮，系統執(zhí)行分支外程序，通過0010、0011旋鈕實現手動啟泵、停泵。
= 3 \* GB3 ③ 液位由0004~0007旋鈕分zui低、較低、較高、zui高四段設定，系統設置由低到高的優(yōu)先權，即當多個設定旋鈕同時閉合時，低液位設定優(yōu)先。
= 4 \* GB3 ④ 采用干簧管檢測液位時，當液位到達檢測點時其觸點閉合，指示燈點亮；液位離開檢測點時其觸點打開，為保證相應測量段指示燈不立即熄滅及不受液位波動的影響，每段指示燈的控制均采用KEEP保持指令，只有當液位上升或下降到相鄰段時指示燈才熄滅。
今日的質量 明日的市場-
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為實現液位的手動/自動控制，需要輸入口12點，輸出口8點，選用C20P 20點I/O單元的PLC，輸入光電隔離，輸出繼電器隔離，負載能力強；液位檢測采用干簧管傳感器，手動/自動轉換、運行/試驗轉換和液位設定采用雙位旋鈕，手動啟泵、停泵和確認、試驗采用常開按鈕；輸出選用電子音響報警器和24V直流指示燈、繼電器。
20 new AMAT 3700-01883 ORING ID 1.176 CSD .070 VITON DURO
AMAT 0020-80012 Flange, Plenum, Side
AMAT 0040-92709, Bearing Plate Rear
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AMAT 0021-04756 Clamp, Bolt Plate, Dual Cell, ECP
2 AMAT 0020-83592 INSULATOR
AMAT 0100-00269 Controller Power Distribution PCB
AMAT 0010-05496 Hose Assembly, ASTRON TWR., Line #2, CH. C,
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AMAT 0010-22229 ASSY CASS PRESENT SENSOR 200MM LLB, 0040-24029, 0090-20235
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AMAT 0020-30625 Housing, Gas Distr. 200MM PRSP
2 AMAT 0150-90551 CA 117.P8/14G.P3
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4 AMAT 3870-03158,HIGH PURITY SOLENOID VALVE FURON HPV2-144NC 2WAY
AMAT 0040-05251 Upper Swingarm
AMAT 0150-21338 Gas Interconnect
4 AMAT 1310-90009 Thermocouple
Two AMAT 0020-37210 Loadlock Casset Holder
AMAT 0150-02494 cable
3 NEW AMAT 3690-02032 SCR PANEL MTG 10-32 x 1/2L PHH W/WSHR-NYL
GE Fanuc Computer Board VMICPCI-7326 CompactPCI AMAT
2 AMAT 0020-07976 BRACKET, PHOTO HELIX GAUGE, 300MM HDPCVD, 399763
NEW AMAT 0240-78566 keyswitch option, ISRM
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AMAT 0050-18654 gas manifoldline, HDPCVD, ULTIMA
AMAT 0020-22840 Mounting Plate, RF Match
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AMAT 0150-36705 cable harness, MFC, CH D, GPLIS
8 AMAT 0150-09325 CABLE MAG TO AC B8
6 AMAT 0040-60925 Chamber plug
AMAT 0021-06008 COVER, CYLINDER, FEND ROBOT
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AMAT 0150-98945 CABLE C/W PROC VACUUM SWITCH, WASCO V250V-01W3B-X/8126
AMAT 0150-01517 Cable Assembly. Ch. C Interlock, 300MM Centura
3 NEW AMAT 0150-36157 C/A Tylan Mfc Long
AMAT 0040-77312, Rear Rack Cassette Tray
new AMAT 0021-01646 producer latch, safety, MW clean lid
AMAT 3700-01565 ORING ID 7.484 CSD .139 SILICONE 70DURO
AMAT 0150-76560 C/A devicenet trunk, system AC 300mm
NEW Nupro Swagelok 6LV-DAFR4-P-C, Diaphram Valve
AMAT 1270-00315 switch pressure pnue 1/4NPT Festo 161760
5 new LB1640N BIDIRECTIONAL MOTOR DRIVER WITH BREAKING FUNCTION
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AMAT 0020-88688 CUP
AMAT 0150-04600 CABLE ASSY, AI/O BLOCK, WAFER LOADER, 399518
6 new AMAT 3700-02661 oring ID .490 CSD .104 Eythl-prop 80duro
New AMAT 0140-77739 harness, AC power, cleaner
AMAT 0950-90377 IC, HI-V, HI-I, SRCE DR.UDN-2981A
AMAT 0021-09703 P5000 CVD chamber, Top Plate, Lid and Shower Head
NEW AMAT 0150-06609 Cable assy, 24V DC fan power, 300MM ULTI, 300 mm
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AMAT 0150-22254 CABLE ASSY, TC TYPE K, CVD-CU
NEW AMAT 0020-06058 Collet, Upper
AMAT 0200-09244 Cover Quartz 8 EXT Cathode WF, west coast quartz
AMAT 0010-12529 CDA Assy Main Framve Producer E
AMAT 0150-20675 Cable, Gas Panel Umbilical A/B
AMAT 0010-30230 ASSEMBLY, H.O.T ANALYZER CARTRIDGE
varian F2687001 plate mounting cooled
AMAT 0150-09617 CABLE, CIRCUIT BREAKER
AMAT 1190-90003 regulator, voltage, var
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Phasetronics P1038A #5035, AMAT 0015-09091, Phase Angle Lamp Driver, 395548
NEW AMAT 0040-90503 Shoe, pick up, 100mm thin waf
AMAT 0620-02908 Cable Chemflow Mon Integra INTL, Ametek Meter
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NEW AMAT 0140-78280 Cable, Utility panel, upper pneumatic pens
AMAT 0150-13235 Cable Assy 32 FT EMO Umbilical, ATD, Assembly
NEW AMAT 0021-79242 STUD, INPUT STATION, 6.50"
AMAT 1270-90252 ISOLATOR 2 POLE 32A
AMAT 0140-04197 HARNESS ASSY INTERLOCK CH D PRE CLEAN RTFT V, 399633
NEW AMAT 3870-05315 Fujikin Diaphram Valve
3 AMAT 0020-82823 Aperture, EPG2
AMAT 0140-91094 X23G. J1/S1-S4/SOLVAL/X13
AMAT 0040-21178 PRECLEAN II BELL JAR, Endura PVD Sputter chamber
4 AMAT 3220-00026 Coupling 8MM X 10MM
AMAT 0140-10279 Harness Assy, Internal PS Dome Lift
AMAT 0150-90183 Cable Assy., CLINE VAC CHAS.., Assembly
NEW AMAT 0021-12529 Cover, HE Side, 300mm Cathode, DPS2
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AMAT 0150-77340 C/A MON/KYBD/MOUSE SIGNAL A
2 new AMAT 0020-32997 bearing tube coupler P500 MC ROBOT
New AMAT 0100-09220 assy gate valve intercon PCB
AMAT 0150-01903 CABLE ASSY, INTERFACE, AC BOX, MCA + I/L
AMAT 0090-01534 Sensor Assy, Mask Present, Photomask
2 AMAT 525-04-034 Tee, 1/4" Union, Swagelok 316 BLK
NEW AMAT 0090-77008 Sensotec Pressure Load Acceleration Displacement
AMAT 0021-21873 Shield, RF Heater Bottom, 1.574" Shaft
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3 NEW AMAT 0090-09069 Thermocouple Chamber Body, Teos Temp
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