ATLEX-LR準分子雷射 特點
- 極快的脈衝上升時間和高峰值功率密度
- 雷射頭體積 <>
- TMC（全金屬陶瓷）雷射管
- 集成真空泵和鹵素過濾器於一體
- 風冷的主動熱控制器
- 用於系統(tǒng)集成的 RS-485、RS232、USB 和光纖接口
- 可清洗的光學支架
- 能量穩(wěn)定的輸出模式
- 符合歐洲 CE 標準
- RoHS 規(guī)範
| ATLEX-LR Specifications | ||
| Gas Medium | ArF | Units |
| Wavelength | 193 | nm |
| Max. Pulse Energy 1 | 12 | mJ |
| Max. stab. Energy | 10 | mJ |
| Pulse Duration 2 | 5 | ns |
| Beam Dimensions 2 (V x H) | 4 x 6 | mm |
| Beam Divergence 2 (V x H) | 1 x 2 | mrad |
| Energy Stability (standard deviation) | <> | % |
| Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm |
| Weight | 60 | kg |
| Cooling | Air | |
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | |
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
