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MSA-100-3D顯微式測振儀

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公司名稱寶力達光學科技（東莞）有限公司
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更新時間 2022-08-11
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寶力達光學科技有限公司是一家專注于光學測量系統(tǒng)解決方案的高科技公司。公司自成立以來，堅持秉承“聚焦光學、創(chuàng)造價值”的經(jīng)營理念，憑借專業(yè)的技術和不斷創(chuàng)新的精神為用戶提供優(yōu)秀的解決方案。作為的光學測量系統(tǒng)方案提供商，我們自主研發(fā)非接觸式激光測振系統(tǒng)，運用激光多普勒技術幫助用戶深入理解結(jié)構(gòu)力學性能，解決結(jié)構(gòu)的安全性、可靠性問題；結(jié)合自動化技術幫助用戶實現(xiàn)產(chǎn)品質(zhì)量的全面管控，解決產(chǎn)品的生產(chǎn)制造、*問題。經(jīng)過10多年的技術沉淀，我們專長于感知、解析和行動 – 實現(xiàn)測量數(shù)據(jù)的采集、分析和有效利用 – 為用戶提供實現(xiàn)生產(chǎn)速度和生產(chǎn)力加速的自信，并提升產(chǎn)品品質(zhì)。科學研究和制造業(yè)的進步，離不開*的測量技術和專業(yè)服務，我們的目標是為用戶提供更加*的測量系統(tǒng)和更加專業(yè)的增值服務。

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激光測振儀

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MSA-100-3D顯微式測振儀 MSA-100-3D 顯微式激光測振儀可在大帶寬范圍內(nèi)實時測量樣本的動態(tài)特性，高分辨率同時記錄和分析XYZ三個方向的振動分量，每向的振幅分辨率均達到亞皮米級。因激光光斑極小，所以橫向分辨率，且?guī)捀哌_ 25 MHz，是用于微機電傳感器(MEMS) 以及其他微結(jié)構(gòu)振動測量的理想設備。通過軟件移動樣品，完成樣品整個表面的振動分析，然后以圖形方式顯......

MSA-100-3D顯微式測振儀產(chǎn)品信息

3D Vibration Measurements for Microsystems

Micro System Analyzer is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry.

The instrument is based on a novel 3D vibrometer setup enabling pm-resolution for both out-of-plane and in-plane motion. It has a frequency bandwidth of 25 MHz. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3D deflection shapes.

The optional integrated XY positioning table together with the sophisticated software enables an easy handling of the probe.

?Real-time measurement with high bandwidth up to 25 MHz
?Sub-pm displacement resolution for both Out-of-Plane and In-Plane motion
?Single-Point and Full-Field scanning measurements
?Small spot size of<4 μm for high lateral resolution
?Large stand-off distance of 38 mm
?Probe station compatible

Principal Configurations	MSA-100-3D Single-Point 3D Vibrometer		MSA-100-3DSV Scanning 3D Vibrometer
Sensor head unit	Microscope optics for best lateral resolution with spot size<4 μm Integrated LED sample illumination
Front-End unit / Data management system	Installed in a system cabinet for 19” electrical equipment: MSA-F-100-3D Vibrometer front end with digital decoder technology MSA-W-100-3D Data Management System
Stａnd (optional)	Rigid stａnd for interfacing the sensor head unit to an optical table or breadboard, incl. focus block with 100 mm travel range for traversing the sensor head unit in the Z axis
Prober compatibility	Compatible to manual, automatic and vacuum probestations
xy Stage	Manual stage (optional)		A-PST-200P XY Precision Positioning Stage: Travel range: 200 mm x 200 mm Tip/tilt adjustment Bi-directional repeatability: +/- 0.5 µm Load capacity: 10 kg
Software	VibSoft-1004 Software Package for data acquisition and analysis		PSV Scanning Vibrometer Software for data acquisition and analysis
Sensor Head Unit
Configuration	Single measurement beam, three direction sensitive detectors
Laser source	DPSS, 532 nm, visible green laser beam
Laser output power	<5 mW visible output power
Laser safety class	Class 2M
Stand-off distance	36,7 mm
Spot diameter	<4 µm
Depth of focus	±10 µm
Weight	12.5 kg
Camera	Two integrated digital cameras for displaying measurement and large overview area MAIN (measurement area): field of view (mm2) = 0.94 x 0.71, resolution (px) = 1,296 x 966 AUX (overview area): field of view (mm2) = 3.7 x 2.7, resolution (px) =782 x 582
Front-End Configurations	MSA-100-3D-H	MSA-100-3D-M		MSA-100-3D-V
fmax	100 kHz	2.5 MHz		25 MHz
Number of ranges	13 velocity ranges	13 velocity ranges		13 velocity ranges
vmax	0.01 m/s … 10 m/s, range dependent	0.001 m/s … 10 m/s, range dependent		0.001 m/s … 10 m/s, range dependent
Velocity resolution, average value	0.01 (µm/s)/√Hz … 0.02 (µm/s)/√Hz range dependent, frequency dependent	0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent, frequency dependent		0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent, frequency dependent
General Specifications
Power consumption	100 VAC ... 240 VAC ±10%, 50/60 Hz; overall max. 825 W
Environmental conditions	Operating temperature: +18 °C ... +28 °C (64.4 °F ... 82.4 °F); Storage temperature: –10 °C ... +65 °C (14 °F ... 149 °F); Relative humidity: max. 80%, non-condensing