詳細說明
【參數(shù)介紹】
1. 結構簡單穩(wěn)固 Strong and simple structure
_ 鑄鐵機身 Cast iron body
_ 結構設計精良 Superior designed construction
_ 減少晶片表面損傷及翹曲 Low surface damage and wafer warpage
2. 自動尺寸控制系統(tǒng) Automatic size measuring system
3. 自動修整系統(tǒng) Automatic dressing system
4. 全自動上下料系統(tǒng) Automatic Loading/Unloading, Auto Handling System
5. 自動清洗、干燥系統(tǒng) Automatic cleaning & dry system
6. 可編程操作系統(tǒng) Programmable operating system
_ 可儲存20套加工程序，簡單操作
Saving max. 20 sets work programs for easy operation
_ 易于操控 Easy to control and maintenance
應用領域 Applications
硅片，碳化硅片，藍寶石晶圓，金屬，陶瓷
碳，玻璃，塑料，復合材料
Silicon Wafer, SiC Wafer, Sapphire, Metals, Ceramics, Carbons, Glasses, Plastics, Composites
型號Model | HRG-150 | VRG-250F | VRG-300F | VRG-500 | |
工件尺寸Grinding wheel speed | 3000 rpm | 3000 rpm | 4000 rpm | 4000 rpm | |
工作軸Working shaft | 0.2kW 260rpm | 0.75kW 260rpm | 1.5kW 260rpm | 2.2kW 260rpm | |
工件尺寸Workpiece sizes | mm | ?150 | ?250 | ?300 | ?500 |
mm | 70 | 100 | 100 | 200 | |
砂輪進給Grinding speed | mm/min | 0.0001~1 | 0.0001~1 | 0.0001~1 | 0.0001~1 |
分辨率Resolution | mm | 0.0001 | 0.0001 | 0.0001 | 0.0001 |
定位精度Positioning precision | mm | ±0.001 | ±0.002 | ||
重復定位精度Repeat positioning precision | mm | ±0.001 | ±0.001 | ±0.001 | ±0.001 |
自動尺寸檢測Automatic size measuring | mm | N/A | Option | Option | Option |
自動修整Automatic dressing | mm | Option | Option | Option | Option |
尺寸Dimensions (L*W*H) | mm |
| 1100x950x1970 | 1200x1050x1970 | 1300x1400x2100 |
重量Weight | Kg | 1400 | 1450 | 1750 | 2000 |
