產(chǎn)品名稱 | 產(chǎn)品規(guī)格 | 精度等級 | |||
0級 | 1級 | 2級 | 3級 | ||
平面度公差(um) | |||||
研磨平臺 | 100*200 | 4.9 | 9.8 | 19.6 | |
200*200 | 5 | 10.3 | 20.5 | | |
200*300 | 5.5 | 10.9 | 21.8 | | |
300*400 | 6 | 12 | 24 | | |
400*400 | 6.5 | 12.5 | 25.1 | | |
400*500 | 6.5 | 13.1 | 26.2 | 65.6 | |
500*500 | 7 | 13.8 | 27.5 | 68.8 | |
500*600 | 7 | 14.2 | 28.5 | 71.2 | |
500*800 | 8 | 15.5 | 31 | 78 |